Bulk analysis:
analysis of metals and alloys,
alloying elements and impurities
Depth profile analysis:
coatings, thin films, surface-modified materials
layers of metals, oxides, nitrides, carbides etc., including non-conductive layers
analysis of light elements (H, O, N, B) and their depth distributions
Scope and range:
Most elements of the periodic table can be analyzed. Concentration ranges, accuracy and correctness depend on the combination of the element analyzed and the matrix and on the accessibility of suitable reference materials for calibration.